Microelectromechanical sensing structure for a pressure sensor including a deformable test structure

ABSTRACT

A microelectromechanical sensing structure having a membrane region including a membrane that undergoes deformation as a function of a pressure and a first actuator that is controlled in a first operating mode and a second operating mode, the first actuator being such that, when it operates in the second operating mode, it contacts the membrane region and deforms the membrane in a way different from when it operates in the first operating mode.

BACKGROUND

Technical Field

The present disclosure relates to a microelectromechanical sensingstructure for a pressure sensor, which includes a test structure that isat least in part deformable.

Description of the Related Art

As is known, there are today available pressure sensors such as, forexample, the so-called sensors of the MEMS (microelectromechanicalsystems) type.

Each MEMS pressure sensor comprises a sensitive structure of a MEMS typeand a reading electronics.

The sensitive structure, which is also known as “sensing structure”,typically forms a cavity delimited in part by a membrane and is designedto generate an electrical quantity (for example, a capacitive orresistive variation) indicating a pressure. Instead, the readingelectronics are designed to carry out appropriate operations ofprocessing of this electrical quantity for supplying an electricaloutput signal, whether analog (for example, a voltage) or digital. Theelectrical output signal is then made available, possibly after priorfurther processing by an electronic interface circuit, to an externalelectronic system, such as for example the microcontroller of anelectronic apparatus that incorporates the pressure sensor.

In greater detail, typically the sensing structure comprises two or morepiezoresistive elements, which are arranged in the proximity of themembrane. In this way, the piezoresistive elements undergo deformationfollowing upon deformation of the membrane, and thus modify their ownvalues of resistance as a function of the deformation of the membrane,and consequently of the pressure exerted on the membrane itself.

Given this, there is particularly felt the need to be able toeffectively test the aforementioned sensing structures. In thisconnection, automatic test equipment (ATE) is known, which is designedto test a number of sensing structures, provided, for example, in a samewafer of semiconductor material. For instance, some test systemsenvisage exerting forces on the membrane, thus from above the wafer, orelse applying a pressure from beneath the wafer. Again, other systemsenvisage arranging the sensing structure in an environment the pressureof which may be varied in a controlled way. Purely by way of example,U.S. Pat. No. 4,708,012 describes a test system that enables exertion ofa pressure on a diaphragm for simulating the presence of a desiredpressure, and determination of whether the corresponding electricaloutput signal assumes correct values. In general, the test systems sofar known enable effective testing of sensing structures of a knowntype; however, according to the cases, they may be characterized by areduced capacity to parallelize the test, or else by high costs.

BRIEF SUMMARY

One embodiment of the present disclosure is directed to amicroelectromechanical sensing structure that includes a membrane regionincluding a membrane that is configured to undergo deformation as afunction of a pressure. The sensing structure includes a first actuatorthat is configured to be controlled in a first operating mode and asecond operating mode, said first actuator being configured to operatewhen in the second operating mode to deform and contact the membraneregion and said first actuator being configured to operate when in thefirst operating mode to deform the membrane in a way different from whenin the second operating mode.

Another embodiment of the present disclosure is directed to a systemthat includes a first die and a sensor formed in the first die. Thesensor includes a first cavity, a membrane over the first cavity, afirst actuator over the membrane, the first actuator being configured tooperate in a first operating mode and in a second operating mode, and acap over the first actuator and over the membrane. There is a secondcavity formed by the cap, the first actuator being in the second cavity.

BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWINGS

For a better understanding of the present disclosure, preferredembodiments thereof are now described, purely by way of non-limitingexample and with reference to the attached plates of drawings, wherein:

FIGS. 1 and 3 are schematic cross-sections of an embodiment of thepresent sensing structure in two different operating conditions;

FIG. 2 is a schematic perspective view of a portion of the embodimentillustrated in FIG. 1, together with an equivalent electrical circuit ofan external electronic device;

FIGS. 4 and 5 are schematic top plan views with portions removed of twodifferent embodiments of the present sensing structure;

FIGS. 6-10 are schematic cross-sections of further embodiments of thepresent sensing structure;

FIG. 11 is a schematic top plan view with portions removed of a variantof the embodiment illustrated in FIG. 10;

FIGS. 12, 14, 15, 17, 18 and 19 are schematic cross-sections of furtherembodiments of the present sensing structure;

FIGS. 13, 16, 20 and 21 are schematic top plan views with portionsremoved of embodiments of the present sensing structure; and

FIG. 22a shows a block diagram of a pressure sensor including thepresent sensing structure;

FIG. 22b shows a block diagram of an electronic system including thepressure sensor illustrated in FIG. 22 a;

FIGS. 23-29 are schematic cross-sections of an embodiment of the presentsensing structure during successive steps of a manufacturing process;and

FIGS. 30-33 are schematic cross-sections of a further embodiment of thepresent sensing structure during successive steps of a manufacturingprocess.

DETAILED DESCRIPTION

FIG. 1 shows a pressure sensor 1, which comprises a sensing structure 2,which includes a semiconductor body 4, a top region 5, and a cap 6.

The semiconductor body 4 comprises a substrate (not shown) and mayfurther comprise one or more epitaxial layers (not shown). In addition,the semiconductor body 4 delimits a cavity 8 of a buried type, referredto herein as “sensing cavity” 8. In particular, without this implyingany loss of generality, the semiconductor body 4 forms a membrane 10,which delimits the sensing cavity 8 at the top and is designed toundergo deformation as a function of the pressure exerted on themembrane itself.

The semiconductor body 4 is delimited at the top and at the bottom by atop surface 5, and a bottom surface S_(b), respectively, referred tohereinafter as “top body surface” S_(a) and “bottom body surface” S_(b).Furthermore, the top body surface S_(a) forms the surface that delimitsthe membrane 10 at the top, i.e., the surface of the membrane oppositeto the sensing cavity 8, referred to hereinafter as “membrane surface”S_(m).

The top region 5 extends on the semiconductor body 4, with which it isin direct contact; thus it also extends on the membrane 10.Consequently, the top region 5 contacts the top body surface S_(a);further, the top region 5 is delimited at the top by a top regionsurface S_(t).

In greater detail, the top region 5 may be of dielectric material; forexample, the top region 5 may be formed by one or more dielectric layers(not shown). Within the top region 5 there may further extendmetallizations (not shown) in a per se known manner.

Without this implying any loss of generality, the sensing structure 2further comprises a first piezoresistive element 12, a secondpiezoresistive element 14, a third piezoresistive element 16, and afourth piezoresistive element 18, even though only the first and secondpiezoresistive elements 12, 14 are illustrated in FIG. 1 (the third andfourth piezoresistive elements 16, 18 are visible, for example, in theembodiment illustrated in FIG. 4).

Each one of the first, second, third, and fourth piezoresistive elements12-18 is formed, for example, by a corresponding region of thesemiconductor body 4, appropriately doped, even though in any casepossible are embodiments in which the first, second, third, and fourthpiezoresistive elements 12-18 are formed by non-semiconductor materialsand thus do not form the semiconductor body 4.

In greater detail, each one of the first, second, third, and fourthpiezoresistive elements 12-18 face the top body surface S_(a), incontact with the top region 5. Furthermore, each one of the first,second, third, and fourth piezoresistive elements 12-18 is such that, inthe presence of any deformation of the corresponding crystal lattice,caused by deformations of the membrane 10, there occurs a localvariation of resistivity.

More in particular, the first, second, third, and fourth piezoresistiveelements 12-18 form a transduction circuitry 20 (the correspondingelectrical connections are not shown) of a type in itself known, whichis designed to generate an electrical transduction signal (in the casein point, without any loss of generality, a voltage signal) indicatingthe pressure present on the membrane 10. The transduction circuitry 20may be biased through corresponding nodes; in these conditions, thetransduction circuitry 20 generates precisely the aforementionedelectrical transduction signal.

The sensing structure 2 further comprises a plurality of pads ofconductive material of a known type, referred to herein as “interfacepads”. In FIG. 1, for simplicity, only a first interface pad 22 and asecond interface pad 24 are illustrated. The considerations provided inwhat follows with reference to the first and second interface pads 22,24 may in any case be extended, in a per se known manner, also to one ormore of the other interface pads (not shown).

The first and second interface pads 22, 24 extend within the top region5 and face the top region surface S_(t), on the outside of the cap 6.Furthermore, the first and second interface pads 22, 24 contact thetransduction circuitry 20 by metallizations (not shown), which extendthrough the top region 5. In this way, either the first interface pad 22or the second interface pad 24 or both of them make available theelectrical transduction signal to the outside world.

As regards the cap 6, it overlies the top region 5, with which it is indirect contact.

In detail, the cap 6 delimits, together with the top region 5, a furthercavity 30, referred to hereinafter as “access cavity” 30.

In greater detail, the cap 6 is, for example, of a semiconductormaterial and has a hole 32, which enables the air to penetrate withinthe access cavity 30; hereinafter the hole 32 will be referred to as“main hole” 32. Furthermore, the membrane 10 and the top region 5 extendbetween the access cavity 30 and the sensing cavity 8.

The sensing structure 2 further comprises a test structure, whichincludes a cantilever element 40, which has a first end, a second end,and a third end, referred to herein respectively as “first proximal end”and “second proximal end” and “distal end”. As illustrated hereinafter,the first and second proximal ends are constrained to the top regionsurface S_(t), whereas the distal end is floating.

The cantilever element 40 comprises a first portion and a secondportion, referred to herein as “first deformable portion” 42 and “seconddeformable portion” 44, which are fixed together and form correspondingcantilever elements.

Without this implying any loss of generality, the first and seconddeformable portions 42, 44 have, in top plan view, a same shape, in thecase in point they are U-shaped, as illustrated in FIG. 2.

The first deformable portion 42 has a first proximal end P_(42a) and asecond proximal end P_(42b), which are constrained to the top regionsurface S_(t) and form the first and second proximal ends, respectively,of the cantilever element 40; further, the first deformable portion 42has a respective distal region D₄₂, which is free and forms the distalend of the cantilever element 40.

In resting conditions, the distal region D₄₂ of the first deformableportion 42 is arranged at a greater height (calculated, for example,with respect to the top region surface S_(t)) than the first and secondproximal ends P_(42a), P_(42b). Thus, the first deformable portion 42has a non-planar profile, which extends on a number of levels in height.Furthermore, the distal region D₄₂ of the first deformable portion 42 isconnected to the first and second proximal ends P_(42a), P_(42b) of thefirst deformable portion 42 through, respectively, a first inclinedregion I_(42a) and a first parallel region 43 a, and a second inclinedregion I_(42b) and a second parallel region 43 b.

In greater detail, in resting conditions, the first and second parallelregions 43 a, 43 b have elongated shapes and extend parallel to the topregion surface S_(t). The distal region D₄₂ of the first deformableportion 42 has an elongated shape and is connected to the first andsecond parallel regions 43 a, 43 b. Further, the distal region D₄₂extends perpendicular to the first and second parallel regions 43 a, 43b, with which, in resting conditions, it is coplanar.

The first inclined region I_(42a) has an elongated shape and isinclined, in resting conditions, with respect to the top region surfaceS_(t). Furthermore, the first inclined region I₄₂, connects the firstparallel region 43 a to the first proximal end P_(42a) of the firstdeformable portion 42.

The second inclined region I_(42b) has an elongated shape and isinclined, in resting conditions, with respect to the top region surfaceS_(t). Furthermore, the second inclined region I_(42b) connects thesecond parallel region 43b to the second proximal end P_(42b) of thefirst deformable portion 42.

The second deformable portion 44 has a respective first proximal endP_(44a) and a respective second proximal end P_(44b), which are fixed,respectively, to the first and second proximal ends P_(42a), P_(42b) ofthe first deformable portion 42, on top of, and in direct contact with,which they are arranged. Furthermore, the first and second proximal endsP_(44a), P_(44b) of the second deformable portion 44 form the first andsecond proximal ends, respectively, of the cantilever element 40.

The second deformable portion 44 further comprises a respective distalregion D₄₄, which is arranged on top of, and in direct contact with, thedistal region D₄₂ of the first deformable portion 42 for forming thedistal end of the cantilever element 40.

In resting conditions, the distal region D₄₄ of the second deformableportion 44 is at a greater height than the first and second proximalends P_(44a), P_(44b) of the second deformable portion 44, which thushas a non-planar profile. Furthermore, the distal region D₄₄ of thefirst deformable portion 44 is connected to the first and secondproximal ends P_(44a), P_(44b) of the second deformable portion 44through, respectively, a third inclined region I_(44a) and a thirdparallel region 45 a, and a fourth inclined region I_(44b) and a fourthparallel region 45 b.

In greater detail, in resting conditions, the third and fourth parallelregions 45 a, 45 b have elongated shapes, extend parallel to the topregion surface S_(t) and are respectively arranged on top of the firstand second parallel regions 43 a, 43 b, with which they are in directcontact. The distal region D₄₄ of the second deformable portion 44 hasan elongated shape and is connected to the third and fourth parallelregions 45 a, 45b. Further, the distal region D₄₄ extends perpendicularto the third and fourth parallel regions 45 a, 45 b, with which, inresting conditions, it is coplanar.

The third inclined region I_(44a) has an elongated shape and isinclined, in resting conditions, with respect to the top region surfaceS_(t). Furthermore, the third inclined region I_(44a) is arranged on topof the first inclined region I_(42b), with which it is in directcontact, and connects the third parallel region 45 a to the firstproximal end P_(44a) of the second deformable portion 44.

The fourth inclined region I_(44b) has an elongated shape and isinclined, in resting conditions, with respect to the top region surfaceS_(t). Furthermore, the fourth inclined region I_(44b) is arranged ontop of the second inclined region I_(42b), with which it is in directcontact, and connects the fourth parallel region 45 b to the secondproximal end P_(44b) of the second deformable portion 44.

In greater detail, in resting conditions, the first and second proximalends P_(42a), P_(42b) of the first deformable portion 42 are at a firstheight, whereas the first and second proximal ends P_(44a), P_(44b) ofthe second deformable portion 44 are at a second height, greater thanthe first height. In addition, the distal region D₄₂ of the firstdeformable portion 42 is arranged at a third height, greater than thesecond height, whereas the distal region D₄₄ of the second deformableportion 44 is arranged at a fourth height, greater than the thirdheight.

In practice, the first deformable portion 42 is arranged between thesecond deformable portion 44 and the top region 5. Furthermore, thefirst deformable portion 42 extends so that, in resting conditions, itoverlies, at a distance, at least part of the membrane 10. Consequently,in resting conditions, also the second deformable portion 44 overlies,at a distance, at least part of the membrane 10. In particular, themembrane 10 is overlaid by the distal region D₄₂ of the first deformableportion 42 and by the distal region D₄₄ of the second deformable portion44.

The sensing structure 2 further comprises a further pair of pads ofconductive material, referred to herein as “first structure pad” 46 and“second structure pad” 47 (the latter being illustrated in FIG. 2). Eachof the first and second structure pads 46, 47 extends within the topregion 5 and faces the top region surface S_(t), and in particular theaccess cavity 30.

Given this, the first and second proximal ends P_(42a), P_(42b) of thefirst deformable portion 42 contact, respectively, the first and secondstructure pads 46, 47, and are thus fixed with respect to the top region5 and the semiconductor body 4.

The sensing structure 2 further comprises, without this implying anyloss of generality, a further pair of pads, referred to hereinafter“first and second test pads” 48, 50.

Each of the first and second test pads 48, 50 extends within the topregion 5 and surfaces on the top region surface S_(t), on the outside ofthe cap 6. Furthermore, the first and second test pads 48, 50 areconnected, respectively, to the first and second structure pads 46, 47by metallizations (not shown) that extend in the top region 5. Each ofthe first and second test pads 48, 50 is thus electrically connected toa corresponding end of the first and second proximal ends P_(42a),P_(42b) of the first deformable portion 42. For practical purposes, thefirst and second test pads 48, 50 may be contacted by a first probe 52and a second probe 54, which form an excitation device 57, an equivalentelectrical circuit of which is illustrated in FIG. 2.

Once again with reference to the first and second deformable portions42, 44, they are, respectively, of a first material and a secondmaterial, which have coefficients of thermal expansion that aredifferent from one another. In particular, the first and secondmaterials have coefficients of thermal expansion such that, as thetemperature of the cantilever element 40 increases, the latter bendstowards the membrane 10.

In greater detail, the cantilever element 40 bends so that the distalend D₄₂ of the first deformable portion 42 contacts a portion of topregion surface S_(t) arranged above the membrane 10 and the sensingcavity 8.

In greater detail, the second material may be chosen so that has alinear coefficient of thermal expansion a at least 10% higher than thelinear coefficient of thermal expansion of the first material.

In addition, the first material is conductive so that within the firstdeformable portion 42 there may circulate a test current, which isapplied through the first and second probes 52, 54 and causes anincrease in temperature of the cantilever element 40 and a consequentdeformation thereof.

As has been mentioned previously, by increasing the temperature of thecantilever element 40, it is possible to cause the distal region D₄₂ ofthe first deformable portion 42, which in resting conditions is arrangedat a distance from the top region 5, to contact the top region 5 andexert a (known) pressure on the membrane 10, as illustrated in FIG. 3.This pressure may be used for testing the sensing structure 2, forexample by verifying that the corresponding electrical transductionsignal assumes an expected value. The pressure exerted on the membrane10 is thus a function of the test current.

In greater detail, the test current may be applied by the excitationdevice 57, through the first and second probes 52, 54, which may formpart of a same automatic test device, for example of a known type.

As regards the second material, which, as has been said, forms thesecond deformable portion 44, also this may be conductive, or else maybe an insulating material such as for example an oxide, a ceramicmaterial, a polymer, or a resin.

Further possible are embodiments (not shown) in which the first andsecond test pads 52, 54 contact, respectively, the first and secondproximal ends P_(44a), P_(44b) of the second deformable portion 44, inwhich case the second material is a conductive material, whereas thefirst material may also be a conductive material, or else an insulatingmaterial.

In general, at least one of the first and second materials iselectrically conductive. Furthermore, it is possible for both the firstand second materials to be metal, so that they will be good electricaland thermal conductors.

In the case where any of the first and second materials is metal, it maybe chosen, for example, from among: copper, aluminum, tungsten, rhodium,palladium, cobalt, iron, gold, beryllium, titanium, molybdenum, zinc,nickel, silver, manganese, or a corresponding alloy. Once again purelyby way of example, also possible are embodiments in which the first andsecond materials form one of the following pairs: tungsten-aluminum,tungsten-copper, copper-aluminum, iron-aluminum, tungsten-zinc,titanium-manganese, tantalum-manganese, titanium-aluminum, ornickel-zinc.

Further possible are embodiments in which the first material or thesecond material is semiconductor material, such as for example silicon,possibly doped.

Purely by way of example, FIGS. 4 and 5 show two different embodiments,which exemplify possible arrangements of the cantilever element 40 withrespect to the first, second, third, and fourth piezoresistive elements12-18. In both cases, it is once again assumed that the seconddeformable portion 44 has a same shape, in top plan view, as the firstdeformable portion 42, on top of which it is arranged. Furthermore, forsimplicity of representation, in FIG. 4 the second deformable portion 44is not illustrated, and the first deformable portion 42 is illustratedonly in part; likewise, in FIG. 5, the second deformable portion 44 isillustrated only in part. Once again for simplicity of representation,in FIGS. 4 and 5 no pad is illustrated.

In detail, in the embodiment illustrated in FIG. 4, the sensing cavity 8has, in top plan view, the shape of a square with rounded vertices.Further, the first and second parallel regions 43 a, 43b extend parallelto a diagonal of the aforementioned rounded square. In particular, thefirst and second parallel regions 43 a, 43 b are arranged so that onerounded vertex is arranged, in top plan view, between them.

In greater detail, in the embodiment illustrated in FIG. 4, each of thefirst, second, third, and fourth piezoresistive elements 12, 14, 16, 18extends, in top plan view, substantially half way along a correspondingside of the aforementioned rounded square and thus overlies a portion ofthis corresponding side, this portion including the point of this sidearranged approximately half way along the side itself. Without any lossof generality, the midpoint of each side may be determined by excludingthe rounded corners of the aforementioned rounded square and thus byconsidering just the rectilinear portion of the side.

In practice, each of the first, second, third, and fourth piezoresistiveelements 12-18 is arranged in a corresponding vertex of an imaginarysquare rotated by 45° with respect to the aforementioned rounded square.Furthermore, each of the first, second, third, and fourth piezoresistiveelements 12-18 overlies a corresponding portion of the edge of thesensing cavity 8. Consequently, in top plan view, the first, second,third, and fourth piezoresistive elements 12-18 are arranged around acenter of symmetry.

Given this, the cantilever element 40 is such that the distal region D₄₂of the first deformable portion 42 contacts a point of the top region 5that substantially coincides, in top plan view, with the aforementionedcenter of symmetry. In this way, the mechanical stress is evenlydistributed between the first, second, third, and fourth piezoresistiveelements 12-18; further, the cantilever element 40 is, in particular,arranged at a distance from the piezoresistive elements 12-18, with theconsequent advantage of not altering appreciably the local mechanicalstress near the piezoresistive elements 12-18.

In the embodiment illustrated in FIG. 5, the third and fourth parallelregions 45 a, 45 b extend, in resting conditions, parallel to a pair ofsides of the aforementioned rounded square. In particular, without anyloss of generality, the third and fourth parallel regions 45 a, 45 b arearranged so that the first piezoresistive element 12 is arranged, in topplan view, between them. In addition, the distal region D₄₄ of thesecond deformable portion 44 passes, in top plan view, over the centerof the aforementioned rounded square.

In other embodiments (not shown), the cantilever element may have, intop plan view, a shape with rounded corners, or in any case withsmoothed corners, or else a V-shape.

In general, as illustrated in FIG. 6, further possible are embodimentsin which the sensing cavity, here designated by 60, is not of a buriedtype, but rather is open at the bottom for giving out onto the bottombody surface S_(b).

According to a different embodiment, illustrated in FIG. 7, each one ofthe distal region D₄₂ of the first deformable portion 42 and the distalregion D₄₄ of the second deformable portion 44 is, in cross-section,V-shaped. Consequently, the distal region D₄₂ of the first deformableportion 42 and the distal region D₄₄ of the second deformable portion 44form an apex portion 64 of the cantilever element 40, which has anelongated shape and is connected, at a first end, to the first and thirdparallel regions 43 a, 45 a and, at a second end, to the second andfourth parallel regions 43 b, 45 b.

In greater detail, each one of the distal region D₄₂ of the firstdeformable portion 42 and the distal region D₄₄ of the second deformableportion 44 is formed by a pair of elongated regions arranged, withoutany loss of generality, at 90° and in contact with one another.Furthermore, the distal region D₄₂ of the first deformable portion 42and the distal region D₄₄ of the second deformable portion 44 define,respectively, a first vertex line L₁ and a second vertex line L₂.

In resting conditions, the first and second vertex lines L₁, L₂ areparallel to one another and perpendicular to the first, second, third,and fourth parallel regions 43 a, 43 b, 45 a, 45 b. Furthermore, thefirst vertex line L₁ overlies the top region surface S_(t) at a distanceshorter than the distance between the top region surface S_(t) itselfand any of the first and second parallel regions 43 a, 43 b.Consequently, following upon deformation of the cantilever element 40,the first vertex line L₁ bears upon the top region surface S_(t). Ascompared to what is illustrated, for example, in FIG. 1, in order toexert a pressure on the membrane 10, a smaller deformation of thecantilever element 40 is thus sufficient.

In a variant (not shown), the apex portion 64 may have a section with arounded shape.

FIG. 8 shows a further possible variant of the sensing structure 2 andregards, without any loss of generality, the case where the cantileverelement 40 has the apex portion 64, and the sensing cavity 8 is of aburied type. In this variant, the cap 6 is overlaid, in direct contact,by a perforated diaphragm 70, which is, for example, of polymericmaterial and has, above the main hole 32, a plurality of secondary holes72. If we assume, without this implying any loss of generality, that themain hole 32 and the secondary holes 72 have a cylindrical shape, it ispossible for the diameter of each secondary hole 72 not to be greaterthan 10% of the diameter of the main hole 32.

The secondary holes 72 have the function of preventing particles ofconsiderable size from penetrating into the access cavity 30, thusinterfering with operation of the cantilever element 40. Furthermore, ingeneral, instead of the perforated diaphragm 70, a semipermeable layermay be present, i.e., one that may be traversed only by air, such as forexample an osmotic membrane.

FIG. 9 shows a further possible variant of the sensing structure 2 andonce again regards, without this implying any loss of generality, thecase where the cantilever element 40 has the apex portion 64, and thesensing cavity 8 is of a buried type. In this variant, the cap 6 isoverlaid, in direct contact, by a closing layer 76, which closes themain hole 32 and has a plurality of undulations above the main hole 32.For instance, the closing layer 76 may be of elastic polymeric materialand may be obtained with a thermoforming process.

For practical purposes, the closing layer 76 prevents undesirable accessof particles into the access cavity 30, but enables transfer into theaccess cavity 30 of the variations of pressure that are set up outsidethe sensing structure 2.

Further possible are embodiments such as the one illustrated in FIG. 10,where, for simplicity of representation and without any loss ofgenerality, it is assumed that the cantilever element 40 is without theapex portion 64, that the sensing cavity 8 is of a buried type, and thatthe main hole 32 is not overlaid either by the perforated diaphragm 70or by the closing layer 76.

In detail, the top region 5 has a portion removed for forming a window80 above the membrane 10. Furthermore, in resting conditions, each oneof the first and second deformable portions 42, 44 has a planar shapeand extends in part on the top region 5 and in part over the window 80,at a distance from the latter.

In greater detail, the first deformable portion 42 is of conductivematerial and extends not only into the access cavity 30, but also on theoutside of the cap 6. Consequently, the first and second proximal endsP_(42a), P_(42b) of the first deformable portion 42 extend on theoutside of the cap 6 and do not contact the first and second structurepads 46, 47, but rather the top region 5. The first and second proximalends P_(42a), P_(42b) of the first deformable portion 42 may becontacted directly by the first and second probes 52, 54 for causing thetest current to flow in the first deformable portion 42. In this way,the first and second structure pads 46, 47, as also the first and secondtest pads 48, 50 and the corresponding connection metallizations, may beabsent. The first, second, third, and fourth piezoresistive elements12-18 may be protected from any external contamination, for example, viaan oxide layer (not shown).

It is, however, possible that, as illustrated in FIG. 11, the sensingstructure 2 presents a first auxiliary pad 82 and a second auxiliary pad84 of conductive material, which extend into the top region 5 startingfrom the top region surface S_(t), which is faced by them. The first andsecond auxiliary pads 82, 84 are in direct contact, respectively, withthe first and second proximal ends P_(42a), P_(42b) of the firstdeformable portion 42. Furthermore, the first and second auxiliary pads82, 84 have surfaces with areas greater than the areas of the first andsecond proximal ends P_(42a), P_(42b) of the first deformable portion42. Consequently, they may be contacted with greater ease by the firstand second probes 52, 54.

Once again with reference to FIG. 10, the cap 6, instead of restingdirectly on the top region 5, is constrained to the latter byinterposition of a coupling region 90 of insulating material such as forexample glass-frit. The coupling region 90 then contacts, in addition tothe cap 6, a part of the top region 5 and a part of the first deformableportion 42.

For practical purposes, in order to deform the cantilever element 40 sothat it exerts a given pressure on the membrane 10, it is possible toinduce an increase in temperature of the cantilever element 40 withoutresorting to the test current. In fact, as illustrated in FIG. 12, it ispossible to arrange the sensing structure 2 on a thermal chuck 85, i.e.,a support of thermally conductive material equipped with a heatingelement (not shown).

In particular, in the case where the increase in temperature of thecantilever element 40 is induced by the thermal chuck 85, it is possibleto adopt the embodiment illustrated precisely in FIG. 12, where both thefirst and second materials may be electrically insulating. In thisembodiment, the first and second test pads 48, 50 and the first andsecond structure pads 46, 47 may be absent.

In practice, in the case where the embodiment illustrated in FIG. 12 isadopted, a thermal stimulus is generated, which causes application of apredetermined pressure on the membrane 10. On the basis of thecorresponding electrical transduction signal, it is thus possible toverify proper operation of the sensing structure 2.

As illustrated in FIG. 13, since the test current may not be generated,the first and second deformable portions 42, 44, and thus the cantileverelement 40, may each have an elongated shape having just one end fixedto the semiconductor body 4, instead of two. In particular, in theembodiment illustrated in FIG. 13, the cantilever element 40 extends, intop plan view, along a diagonal of the aforementioned rounded square,until it overlies the center of the rounded square.

According to a different embodiment (illustrated in FIG. 14), thecantilever element is formed by the first deformable portion, heredesignated by 92, which is of a piezoelectric material; in this case,the second deformable portion 44 may be absent.

In detail, in top plan view, the first deformable portion 92 has anelongated shape, of the type illustrated in FIG. 13. The firstdeformable portion 92 thus extends along a diagonal of theaforementioned rounded square. Furthermore, the first deformable portion92 has a non-planar shape; consequently, the first deformable portion 92comprises the first proximal portion, here designated by P₉₂, and thedistal region, here designated by D₉₂. The first proximal portion P₉₂ isfixed to the top body surface S_(a), whereas the distal region D₉₂overlies the membrane 10 at a distance in resting conditions. Further,the first proximal portion P₉₂ contacts the first structure pad 46.

In greater detail, a first electrode E_(l) and a second electrode E₂ arearranged, respectively, underneath and above a part of the firstdeformable portion 92, and in direct contact with the latter, this partextending, in resting conditions, parallel to, and at a distance from,the top region surface S_(t). The first and second electrodes E₁, E₂perform the function of applying a voltage, in a per se known manner, onthe aforementioned part of the first deformable portion 92 for bringingabout deformation of the latter. For this purpose, the first and secondelectrodes E₁, E₂ are electrically connected, respectively, to the firststructure pad 46 and to the second structure pad 47 (the latterconnection not being shown in FIG. 14).

In use, the first and second probes 52, 54 apply a voltage between thefirst and second test pads 48, 50, and thus between the first and secondstructure pads 46, 47. Consequently, at least one part of the firstdeformable portion 92 is subjected to an electrical field and undergoesdeformation so that the distal region D₉₂ bears upon the top regionsurface S_(t), exerting on the membrane 10 a pre-set pressure. In a waysimilar to what has been described regarding the previous embodiments,it is thus possible to verify proper operation of the sensing structure2.

According to a different embodiment (illustrated in FIG. 15), thesensing structure 2 comprises a beam 100, which has an elongated shape,has two ends constrained to the top region surface S_(t) and includes asuspended portion, aligned to the corresponding ends and arranged, inresting conditions, above the membrane 10, at a distance from thelatter.

The beam 100 is formed by the first and second deformable portions(designated, respectively, by 102 and 104), each of which in turn hasthe shape of a beam. Consequently, each one of the first and seconddeformable portions 102, 104 has an elongated shape, has two endsconstrained, directly or indirectly, to the top region surface S_(t),and includes a respective suspended portion, aligned to thecorresponding ends and suspended, in resting conditions, above themembrane 10, at a distance from the latter. Without any loss ofgenerality, the first and second deformable portions 102, 104 have, intop plan view, a same shape of rectilinear elongated element.

In greater detail, the first and second proximal ends of the firstdeformable portion 102, here designated by P_(102a) and P_(102b)respectively, are also in this case in electrical contact with the firstand second structure pads 46, 47, respectively, which are arrangedaligned in the direction of lengthening of the first deformable portion102.

As illustrated in FIG. 16, in one embodiment the beam 100 extends, intop plan view, along a diagonal of the aforementioned rounded square.For simplicity of representation, among other things, no pad isillustrated in FIG. 16.

FIG. 17 shows an embodiment in which the beam 100 comprises an apexportion 110, which is, without any loss of generality, V-shaped. Inparticular, the apex portion 110 extends towards the membrane 10,starting from a horizontal portion 112 of the beam 100, which, inresting conditions, is parallel to the membrane 10. Further, in restingconditions, the apex portion 110 is arranged at a distance from themembrane 10 that is shorter than the distance between the horizontalportion 112 and the membrane 10 itself. Once again, in top plan view,the apex portion 110 overlies the center of the aforementioned roundedsquare.

For practical purposes, thanks to the presence of the apex portion 110,a reduced deformation of the beam 100 is sufficient to cause the apexportion 110 to exert a pressure on the membrane 10.

Once again with reference to the embodiments illustrated in FIGS. 15-17,and in particular with reference to the first and second deformableportions 102, 104, the teachings developed with reference to theprevious figures still apply. Consequently, in the case where theincrease in temperature of the beam 100 is induced electrically, atleast one of the first and second materials is conductive in order toenable flow of the test current within the corresponding deformableportion of the beam 100. In particular, in the embodiments illustratedin FIGS. 15-17, the first material is conductive since the first andsecond structure pads 46, 47 contact the first deformable portion 102;there are, however, possible variants in which the first and secondstructure pads 46, 47 contact the second deformable portion 104, inwhich case the second material is conductive.

In the case where the increase in temperature of the beam 100 is inducedfrom outside, for example via the thermal chuck 85, the first and secondmaterials may both be non-conductive, and further the first and secondtest pads 48, 50 and the first and second structure pads 46, 47 may beabsent.

In addition, even though not illustrated, it is possible for the sensingcavity not to be of a buried type, but rather open at the bottom. It isfurther possible for one or both of the first and second deformableportions 102, 104 to be at least in part of a piezoelectric material, asillustrated, for example, in FIG. 18.

In detail, in the embodiment illustrated in FIG. 18, the firstdeformable portion 102 is of piezoelectric material. Consequently, asmentioned in connection with FIG. 14, also this embodiment may compriseelectrodes (not shown), which may be biased, for example through thefirst structure pad 46 and a third structure pad 47bis.

According to a different embodiment (illustrated in FIG. 19), thesensing structure 2 comprises a first deforming element 132 and a seconddeforming element 134, of piezoelectric material and arranged within theaccess cavity 30, above the top region 5, with which they are in directcontact. This enables simplification of the process of production of thedeforming elements 132, 134. In this embodiment, the first and secondstructure pads 46, 47 are arranged in direct contact, respectively, withthe first deforming element 132 and the second deforming element 134.

In use, through the first and second probes 52, 54 it is possible toapply corresponding voltages to the first and second deforming elements132, 134, causing deformation thereof. In this way, the first and seconddeforming elements 132, 134 deform, in a controlled way, a portion oftop region 5 arranged above the membrane 10, as well as the membrane 10itself.

As illustrated in FIG. 20, it is further possible for the deformingelements to be in a number other than two. For instance, in theembodiment illustrated in FIG. 20, the sensing structure 2 alsocomprises a third deforming element 136 and a fourth deforming element138, once again of piezoelectric material. Furthermore, the first,second, third, and fourth deforming elements 132, 134, 136, 138 eachhave an elongated shape. Once again, in top plan view, the first andthird deforming elements 132, 136 are arranged along a first diagonal ofthe aforementioned rounded square, in a way specular with respect to thecenter of the rounded square, and in particular for overlyingcorresponding vertices of the rounded square, where by “vertex” is meanta point defined by the intersection between a diagonal of the roundedsquare and the perimeter of the rounded square. Likewise, the second andfourth deforming elements 134, 138 are arranged along a second diagonalof the rounded square, in a way specular with respect to the center ofthe rounded square, and in particular for overlying correspondingrounded vertices of the rounded square. Each one of the first, second,third, and fourth deforming elements 132, 134, 136, 138 contacts acorresponding structure pad (not shown) and may thus be set at acorresponding voltage through the use of probes.

As illustrated in FIG. 21, it is further possible for the first, second,third, and fourth deforming elements (here designated, respectively, by142, 144, 146, 148) to be each formed by a corresponding bimetallicstrip of a planar type. In top plan view, each bimetallic strip isU-shaped. Consequently, each bimetallic strip is designed to betraversed by a current, which may be applied by a pair of correspondingstructure pads (not shown), and to bend following upon the rise intemperature thus generated for exerting a pressure on the membrane 10.Also in this case, it is, however, possible for the increase intemperature to be induced from outside, for example through the thermalchuck 85.

In greater detail, each one of the first, second, third, and fourthdeforming elements 142, 144, 146, 148 is arranged so that, in top planview, the plane surface defined by the respective U shape is arranged ontop of the corresponding vertex of the rounded square.

Irrespective of the details of implementation of the sensing structure2, the pressure sensor 1 may be formed in a first die 160, a second die170, and a third die 180, as illustrated in FIG. 22a , where, withoutthis implying any loss of generality, the second die 170 is arrangedabove the first die 160, while the third die 180 is arranged underneaththe first die 160. In particular, the semiconductor body 4, the topregion 5, and the transduction circuitry 20 are formed in the first die160, whereas the cap 6 is formed by the second die 170. The third die180 forms an electronic reading circuit 190, which is electricallyconnected to the first and second interface pads 22, 24 for receivingthe electrical transduction signal. The electronic reading circuit 190may, for example, be a so-called ASIC (application-specific integratedcircuit) and is designed to process the electrical transduction signalfor generating a processed electrical signal.

As illustrated once again in FIG. 22a , it is further possible for atest circuit 196 also to be formed in the third die 180. In this case,the first and second test pads 48, 50 may be connected to the testcircuit 196, for example by through silicon vias (TSVs) or wire bonding.There are in any case possible embodiments in which the test circuit 196and/or the electronic reading circuit 190 are formed within the firstdie 160; in the case where both the test circuit 196 and the electronicreading circuit 190 are formed within the first die 160, the third die180 may be absent.

Irrespective of the arrangement, the test circuit 196 is designed tocarry out a closed-loop test on the pressure sensor 1; thus, it isdesigned to: i) apply a test signal to the first and second test pads48, 50, and thus to the first and second structure pads 46, 47 forbringing about a pre-set deformation of the membrane 10; and ii) verify,by co-operating with the electronic reading circuit 190, that theelectrical transduction signal assumes an expected value for verifyingproper operation of the pressure sensor 1. It should further be notedthat, even though in FIG. 22a reference is made, by way of example, tothe case where the cantilever element 40 comprises the first and seconddeformable portions 42, 44, it is possible for the deformation of themembrane to be obtained by use of a different cantilever element, orelse a beam, or else one or more deforming elements, as described withreference to any of the previous embodiments. Furthermore, the testcircuit 196 may be electrically connected in a different way to thecantilever element, or else, according to the embodiment, to the beam,or else to the one or more deforming elements. For instance, the testcircuit 196 may be connected directly to the first and second structurepads 46, 47, in which case the first and second test pads 48, 50 may beabsent.

As illustrated in FIG. 22b , the pressure sensor 1 may in turn form anelectronic system 191, such as for example a mobile communicationsdevice, a PDA (personal digital assistant), a notebook, a hearing-aiddevice, etc.

The electronic system 191 comprises a microprocessor 192, a memory block193, connected to the microprocessor 192, and an input/output interface194, for example equipped with a keypad and a screen, which is alsoconnected to the microprocessor 192. The pressure sensor 1 sends theprocessed electrical signal to the microprocessor 192, possibly afterprior processing by a further electronic interface circuit (not shown).

The electronic system 191 further comprises a transducer, formed, forexample, by a speaker 195 designed to generate sounds. In this case, thepressure sensor 1 may function as microphone.

The present sensing structure may be produced by the manufacturingprocess described in what follows and illustrated in FIGS. 23-33. By wayof example, the manufacturing process refers to the embodimentillustrated in FIG. 1.

In detail, as illustrated in FIG. 23, there are formed the semiconductorbody 4, the membrane 10, the top region 5, the sensing cavity 8, thefirst, second, third, and fourth piezoresistive elements 12-18, thefirst and second structure pads 46, 47 (the latter pad not beingillustrated either in FIG. 23 or in the subsequent figures), as well asthe first and second interface pads 22, 24 and the first and second testpads 48, 50.

Next, as illustrated in FIG. 24, an oxide layer 200 is formed, forexample by deposition, on the top region surface S_(t). The oxide layer200 may function at least in part as sacrificial layer, as describedhereinafter; further, embodiments (not described any further herein) arepossible in which, instead of the oxide layer 200, a differentdielectric layer is formed.

Next, as illustrated in FIG. 25, a process of masking and etching iscarried out for removing portions of the oxide layer 200 above the firstand second structure pads 46, 47, exposing the latter.

Then, as illustrated in FIG. 26, formed on the oxide layer 200 is afurther layer, referred to herein as “first functional layer” 210. Thefirst functional layer 210 is of the aforementioned first material.

Next, as illustrated in FIG. 27, on the first functional layer 210 afurther layer is formed, referred to herein as “second functional layer”220. The second functional layer 220 is of the aforementioned secondmaterial.

In greater detail, each one of the first and second functional layers210, 220 may be obtained, for example, by chemical vapor deposition(CVD), or else by physical vapor deposition (PVD), or else byelectrolytic plating, or electroless plating.

Next, as illustrated in FIG. 28, a process of masking and etching iscarried out for removing portions of the first and second functionallayers 210, 220 selectively and thus form the first and seconddeformable portions 42, 44.

Then, as illustrated in FIG. 29, the oxide layer 200 is removed forfreeing the distal regions of the first and second deformable portions42, 44. This occurs in a per se known manner in the field of MEMStechnologies, for example by carrying out an etching process.

Even though it is not shown, it is possible, with the use of a mask, forthe removal of the oxide layer 200 to be only partial and thus, forexample, for just a residual portion of the oxide layer 200 to remainunderneath the first deformable region 42 in contact with the first andsecond inclined regions I_(42a), I_(42b).

Then, the sensing structure 2 is completed in a per se known manner.

The manufacturing process described may be applied, with correspondingvariations, also in the case where the first deformable portion is ofpiezoelectric material and the second deformable portion is absent, aswell as in the case where, instead of the cantilever element 40, thebeam 100 is present.

As regards the embodiment illustrated in FIG. 10, it may be obtained bycarrying out the operations illustrated in FIG. 23, except that, duringthese operations, the first and second test pads 48, 50 and the firstand second structure pads 46, 47 are not formed.

Following upon execution of the operations illustrated in FIG. 23, thefirst functional layer 210 is formed on the top region 5, and the secondfunctional layer 220 is formed on the first functional layer 210, asillustrated in FIG. 30.

Next, as illustrated in FIG. 31, a process of masking and etching iscarried out for removing selectively portions of the second functionallayer 220 and form the second deformable portion 44.

Then, as illustrated in FIG. 32, a process of masking and etching iscarried out for removing selectively portions of the first functionallayer 210 and form the first deformable portion 42.

Next, as illustrated in FIG. 33, via a process of masking and etching,portions of the top region 5 are removed for freeing the distal regionsof the first and second deformable portions 42, 44. For example, anetching process may be carried out. Finally, the sensing structure 2 iscompleted in a per se known manner.

The operations referred to in FIGS. 30-33 may be modified, for exampleby adopting a first functional layer of piezoelectric material, in whichcase the second functional layer may not be formed. In this way, anembodiment (not shown) of the type illustrated in FIG. 10 is obtained,where the cantilever element is of piezoelectric material. In this case,in a per se known manner, two electrodes are formed in contact with thecantilever element, these electrodes being electrically accessible fromoutside the cap 6 and enabling application of a voltage to at least onepart of the cantilever element to cause deformation thereof.

From what has been described and illustrated previously, the advantagesthat the present solution affords are evident.

In detail, the present sensing structure has a built-in self-test (BIST)structure, which comprises an actuator (for example, the cantileverelement 40, the beam 100, or else one of the deforming elements 132-138and 142-148). The actuator may be controlled, i.e., actuated, in a firstoperating mode, where it is arranged at a distance from a membraneregion, which comprises the membrane 10, and in a second operating mode,where it contacts this membrane region and exerts a mechanical force onthe membrane for bringing about a corresponding deformation of themembrane and consequent generation of a corresponding sensing signal,which may be analyzed for verifying operation of the sensing structure.

In practice, the built-in self-test structure enables exertion on themembrane 10 of a force, and thus a pressure, of a pre-set value, in away controlled and independent of the pressure present on the outside ofthe sensing structure. In this way, it is effectively possible to testthe sensing structure.

The present sensing structure further enables testing to be carried outboth in the final stage of application and during the manufacturingprocess, for example in the so-called steps of electrical wafer sortingand final testing.

Furthermore, the present sensing structure enables characterization andcalibration of the pressure sensor in a repeatable and reliable waysince the pressure sensor is stimulated mechanically always by a sameactuator.

In addition, the present sensing structure may be tested using standardtest systems, which are particularly simple, inexpensive, and such as toenable parallelization of tests made on a large number of sensingstructures.

In conclusion, it is clear that modifications and variations may be madeto what has been described and illustrated herein, without therebydeparting from the scope of the present disclosure.

For instance, the transduction circuitry 20 may be different from whathas been illustrated and described herein. For example, instead of thepiezoresistive elements 12-18, it is possible for the transductioncircuitry 20 to comprise a first plate and a second plate of a capacitorwith variable capacitance, this capacitance indicating the pressureexerted on the membrane. In any case, the sensing structure 2 isdesigned to vary an electrical quantity as a function of the pressurethat acts on the pressure sensor 1, and in particular on the membrane10.

Once again with reference to the case where the piezoresistive elements12-18 are present, they may be present in a number other than four.Further, one or more of the piezoresistive elements may be electricallyseparated from the membrane 10, as well as from the semiconductor body4, for example by interposition of one or more insulating layers (notshown). Once again, the arrangements with respect to the piezoresistiveelements 12-18 of the cantilever element 40, the beam 100, and one ormore of the deforming elements 132-138, 142-148 may differ from what hasbeen described.

Furthermore, it is possible for the membrane 10 to be of anon-semiconductor material and for the sensing cavity 8 to be delimitedonly in part by the semiconductor body 4. In turn, the sensing cavity 8may have a shape, in top plan view, different from what has beendescribed, such as for example a circular shape, or else the shape of apolygon with smoothed (for example rounded) vertices.

In addition, in each of the embodiments described, at least one part ofthe top region 5, arranged above the membrane 10, may be removed, inwhich case the cantilever element 40 or else the beam 100 may come tobear directly upon the membrane 10. Further possible are embodiments inwhich the top region 5 is absent.

It is further possible for the cap 6 and the electronic reading circuit190 to be formed in a same die, in which case the pressure sensor 1 isformed by two dice; in addition, it is possible for also the testcircuit 196 to be formed within the die that forms the cap 6.

Finally, details described with reference to given embodiments may beimplemented in other embodiments. In this connection, purely by way ofexample, embodiments are possible of the type illustrated in FIG. 10,where the cantilever element 40 comprises an apex portion.

The various embodiments described above can be combined to providefurther embodiments. These and other changes can be made to theembodiments in light of the above-detailed description. In general, inthe following claims, the terms used should not be construed to limitthe claims to the specific embodiments disclosed in the specificationand the claims, but should be construed to include all possibleembodiments along with the full scope of equivalents to which suchclaims are entitled. Accordingly, the claims are not limited by thedisclosure.

1. A sensing structure, comprising: a membrane region including amembrane that is configured to undergo deformation as a function of apressure; and a first actuator that is configured to be controlled in afirst operating mode and a second operating mode, the first actuator, inthe second operating mode, being configured to deform and contact themembrane region.
 2. The sensing structure according to claim 1, furthercomprising a test structure including the first actuator andtransduction circuitry, the transduction circuitry configured to vary atleast one electrical quantity as a function of deformation of themembrane.
 3. The sensing structure according to claim 1 wherein thefirst actuator includes a first deformable portion and a seconddeformable portion made of a first material and a second material,respectively, the first and second materials having coefficients ofthermal expansion that are different from one another.
 4. The sensingstructure according to claim 1, further comprising a semiconductor body,the membrane being of semiconductor material, the first actuator havinga first end and a second end connected to the semiconductor body.
 5. Thesensing structure according to claim 1 wherein the first actuator, inthe first operating mode, is arranged at a distance from the membraneregion.
 6. The sensing structure according to claim 1, furthercomprising a semiconductor body having a surface, the first actuatorincluding a suspended portion, which extends parallel to the surface,and an apex portion, which extends from the suspended portion to thesurface.
 7. The sensing structure according to claim 1, furthercomprising a plurality of piezoresistive elements positioned around acenter of the membrane region, the first actuator, in the secondoperating mode, contacting the center of the membrane region.
 8. Thesensing structure according to claim 1 wherein the first actuator is indirect contact with the membrane region both when in the first operatingmode and in the second operating mode.
 9. The sensing structureaccording to claim 1, further comprising: a first cavity positionedbelow the membrane; and a cap coupled to the membrane region and forminga second cavity, the first actuator extending at least in part withinthe second cavity.
 10. The sensing structure according to claim 9wherein the first actuator includes an electrically conductive part thatextends outside of the second cavity.
 11. A process for manufacturing asensing structure, comprising: forming a membrane region including amembrane that is configured to undergo deformation as a function of apressure; and forming an actuator that is configured to be controlled ina first operating mode and a second operating mode, the actuator, in thesecond operating mode, being configured to deform and contact themembrane region.
 12. The process of claim 11, further comprising:positioning a cap over the membrane region and over the actuator; andcoupling a test circuit to the actuator.
 13. A device, comprising: asubstrate; a membrane region in the substrate, the membrane regionincluding a first cavity and a membrane overlying the first cavity; anda first actuator including a first portion on the substrate and a secondportion overlying the first cavity.
 14. The device of claim 13, furthercomprising a plurality of piezoresistive elements in the substrate, theplurality of piezoresistive elements overlying edges of the firstcavity.
 15. The device of claim 13 wherein the first actuator extendsover a corner of the first cavity.
 16. The device of claim 13 whereinthe first actuator extends over a side of the first cavity.
 17. Thedevice of claim 13 wherein the first actuator is on a first side of thesubstrate, and the cavity is open on a second side, opposite to thefirst side, of the substrate.
 18. The device of claim 13, furthercomprising a cap on the substrate, the cap forming a second cavity, thesecond portion of the first actuator being positioned in the secondcavity.
 19. The device of claim 18 wherein the cap includes a throughhole that overlies the first cavity.
 20. The device of claim 19, furthercomprising a diaphragm overlying the through hole.
 21. The device ofclaim 18 wherein the first portion of the first actuator is positionedoutside of the second cavity.
 22. The device of claim 13 wherein thefirst actuator includes a third portion on the substrate, the secondportion positioned between the first portion and the third portion, thefirst cavity positioned between the first portion and the third portion.23. The device of claim 13, further comprising a second actuator, thesecond actuator including a first portion on the substrate and a secondportion overlying the first cavity.
 24. The device of claim 13 whereinthe first and second portions of the first actuator are coplanar. 25.The device of claim 13 wherein the first actuator includes a thirdportion overlying the first cavity, a fourth portion overlying the firstcavity, and a fifth portion on the substrate, the third portionphysically coupling the second portion to the fourth portion, the secondand fourth portions extending in a first direction, the third portionextending in a second direction that is substantially perpendicular tothe first direction.